发布时间:2023/8/15 15:48:25 作者:曹修全1,2,张洁梅2,林长海*,3,徐浩铭2 【字体:
大 中 小】
曹修全1,2,张洁梅2,林长海*,3,徐浩铭2
(1.宜宾四川轻化工大学产业研究院,四川 宜宾 644000;2.四川轻化工大学 机械工程学院,四川 自贡 643000;3.四川苏格通讯技术有限公司,四川 宜宾 644000)
摘要:目前,氮化铝(AlN)粉体的主要制备方法包括碳热还原法、直接氮化法、自蔓延高温合成法、化学气相沉积法和等离子体合成法,而碳热还原法和直接氮化法是工业化制备高端氮化铝粉体的主要方法。然而,由于现有制备方法自身的技术壁垒和国外的技术封锁,国产氮化铝粉体品质亟待提高。相比于现有氮化铝粉体制备方法,利用高温、富氮、稳定的纯氮层流等离子体束制备高端氮化铝粉体为高端氮化铝粉体制备提供了新思路,也是有望提高国产氮化铝粉体品质的新方法。
关键词:氮化铝粉体;材料性能;制备方法
中图分类号:TB321 文献标志码:A doi:10.3969/j.issn.1006-0316.2023.07.002
文章编号:1006-0316 (2023) 07-0011-09
Research Progress and Prospect of Aluminum Nitride Powder Preparation Technology
CAO Xiuquan1,2,ZHANG Jiemei2,LIN Changhai3,XU Haoming2
( 1.Industrial Research Institute of Sichuan University of Science &Engineering in Yibin, Yibin 644000, China; 2.School of Mechanical Engineering, Sichuan University of Science & Engineering, Yibin 644000, China; 3.Sichuan Suge Communication Technology Co., Ltd., Yibin 644000, China )
Abstract:At present, the main preparation methods of aluminum nitride (AlN) powders include the carbothermal reduction method, direct nitride method, self-propagation high temperature synthesis method, chemical vapor deposition method and plasma synthesis method. The carbothermal reduction method and direct nitride method are the main methods of industrial preparation of high-end AlN powders. However, due to the technical barriers of the existing preparation methods and the foreign technical blockade, the quality of domestic AlN powders urgently awaits to enhance. Compared with the existing preparation methods, a new idea for the preparation of high-end AlN powders is proposed by using the pure nitrogen laminar plasma jet, which could provide high temperature, rich nitrogen and stable preparation environments. It is also a new method to improve the quality of domestic AlN powders.
Key words:AlN powders;material properties;preparation methods;research progress;development trend
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收稿日期:2022-08-17
基金项目:宜宾市科技计划项目(2021JC002);长安大学中央高校基本科研业务费专项资金(300102252502);机械结构优化及材料应用泸州市重点实验室开发基金(SCHYZSA-2022-02);四川轻化工大学研究生创新基金(y2021027);大学生创新创业项目(S202210622053)
作者简介:曹修全(1989-),男,重庆巫山人,博士,副教授,主要研究方向为等离子技术及应用,E-mail:cao_comeon@126.com。*通讯作者:林长海(1982-),男,福建福州人,硕士,工程师,主要研究方向为电子信息技术,E-mail:411469879@qq.com。