锥形套表面缺陷微观形貌的白光相移干涉重构及显著性检测
陈利，董勇
（中国工程物理研究院 电子工程研究所质检中心，四川 绵阳 621900）
摘要：针对锥形套在机械抛光后出现白点、凹坑等表面缺陷，采用特别目视方法，用电镜扫描能谱分析进行成分分析，用白光相移干涉术对表面微观形貌进行重构，并基于ITTI视觉显著性模型对重构图像进行显著性检测。最后提取出显著性目标的轮廓特征，从而反推分析产生缺陷的原因，指导加工，提高首次交检合格率。结果表明白光相移干涉术能高效重构微坑这类缺陷的形貌，而ITTI显著性检测对视觉污染具有良好平衡能力，显著性目标的特征分析反映损伤形成机理。根据缺陷特征指导加工，制定出相应的措施，可有效减少锥形套的表面缺陷。通过锥形套这个典型案例分析，本文采取的检测手段和改进加工的措施可以广泛应用于此类曲面异性回转体零件，有效提高机械抛光合格率。
关键词：锥形套表面；凹坑；白光相移干涉；显著性检测
中图分类号：TG145 文献标志码：B doi：10.3969/j.issn.1006-0316.2021.01.011
文章编号：1006－0316 (2021) 01－0075－06
White Light Phase-Shifting Interference on the Surface Defects of Conical Sleeve Reconstruction and Significance Detection
CHEN Li，DONG Yong
( Quality Inspection Center of Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China)
Abstract：In view of the surface defects such as white spots and pits in the conical sleeve after mechanical polishing, in this paper, by using special visual method, SEM scanning energy spectrum analysis for composition analysis and the white light phase-shifting interferometry for surface micro morphology reconstruction are conducted, and the significance detection of the reconstructed image is carried out based on the ITT visual significance model. Finally, the contour characteristics of the significant objects is extracted to analyze the causes of defects, provide guidance for processing and improve the qualified rate of the first inspection. The results show that white light phase-shifting interferometry can effectively reconstruct the morphology of the defects as micro pits, the significance detection of ITTI can restrain the visual pollution to keep balance, and the feature analysis of significance targets reflects the damage formation mechanism. Processing improved according to the characteristics of the defects can effectively reduce the surface defects of the conical sleeve. The inspection method and improvement measures adopted in this paper can be widely used in this kind of curved anisotropic rotating parts, thus effectively improving the qualified rate of mechanical polishing.
Key words：conical sleeve surface；pit；white light phase-shifting interference；significance detection
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收稿日期：2020－04－21
作者简介：陈利（1983－），四川宜宾人，高级工，主要从事机械零件、装配检验的工作，E-mail：935417922@qq.com。
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