基于ANSYS Workbench的真空镀膜设备真空室体有限元分析

 华海宇,罗阳

(四川大学 制造科学与工程学院,四川 成都 610065)
摘要:以真空镀膜设备真空室体为研究对象,利用Inventor建立三维模型,导入ANSYS Workbench中进行有限元分析。通过对ANSYS Workbench后处理数据进行分析得出真空室体在标准大气压作用下的总变形量、等效应力、等效应变分布规律,根据分析结果结合技术要求对真空室体结构进行优化设计。
关键词:真空镀膜设备;真空室体;ANSYS Workbench 
中图分类号:TB753.2 文献标志码:A doi:10.3969/j.issn.1006-0316.2015.03.012
文章编号:1006-0316 (2015) 03-0043-04
Finite element analysis of vacuum chamber of a vacuum coating equipment based on ANSYS Workbench
HUA Hai-yu,LUO Yang
( School of Manufacturing science and engineering, Sichuan University, Chengdu 610065, China )
Abstract:Take the vacuum chamber of a vacuum coating equipment as the research object,establish the 3D model of vacuum chamber in Inventor software, then leading the three-dimensional model into finite element analysis software ANSYS Workbench. Total deformation, equivalent stress and equivalent strain under standard atmospheric pressure were carried out. On the basis of the results the vacuum chamber is optimized.
Key words:vacuum coating equipment;vacuum chamber;ANSYS Workbench
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收稿日期:2014-09-22
作者简介:华海宇(1988-),男,四川威远人,硕士研究生,主要研究方向为计算机辅助设计制造;罗阳(1969-),男,四川成都人,博士,教授,主要研究方向为计算机辅助设计制造。
 

 

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