涂层表面形貌的分形表征研究
王洪娇,秦襄培*
(武汉工程大学 机电工程学院,湖北 武汉 430205)
摘要:涂层表面粗糙度值较小,用于表征涂层表面形貌特征时受仪器分辨率以及采样区域的影响较大。本研究利用AE-100白光干涉仪分别采集四组实验中TiN涂层以及钌铱涂层的表面图像、三维粗糙度参数Sa及表面三维形貌。基于分形理论采用与尺度无关的分形维数表征涂层表面形貌特征,采用盒子维方法利用MATLAB编程计算了涂层表面的三维分形维数。实验结果显示,与分形维数D相比,粗糙度Sa的变化较大。因此,体现了分形维数在表征涂层表面三维形貌方面的优势。
关键词:涂层;表面形貌;盒子维方法;MATLAB;分形维数
中图分类号:TG335.86 文献标志码:A doi:10.3969/j.issn.1006-0316.2020.11.011
文章编号:1006-0316 (2020) 11-0071-05
Fractal Characterization of Coating Surface Morphology
WANG Hongjiao,QIN Xiangpei
( School of Mechanical and Electrical Engineering, Wuhan Institute of Technology, Wuhan 430205, China )
Abstract:The roughness value of the coating surface is small, which is greatly affected by the resolution of the instrument and the sampling area. In this study, AE-100 white light interferometer was used to collect the surface image, three-dimensional roughness parameter Saand three-dimensional surface morphology of TiN coating and ruthenium iridium coating in four groups of experiments. Based on the fractal theory, the fractal dimension independent of scale is used to characterize the morphology of the coating surface, and the box dimension method is used to calculate the three-dimensional fractal dimension of the coating surface by MATLAB programming. The experimental results show that the roughness Sa changes greatly compared with the fractal dimension D. Therefore, the advantages of fractal dimension in characterizing the three-dimensional morphology of the coating surface are demonstrated.
Key words:coating;surface morphology;box dimension method;MATLAB;fractal dimension
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收稿日期:2020-03-16
作者简介:王洪娇(1994-),女,山西武乡人,硕士研究生,主要研究方向为摩擦学计算机仿真。*通讯作者:秦襄培(1972-),男,湖北武汉人,博士,副教授、硕士研究生导师,主要研究方向为摩檫学计算机仿真、图像处理,E-mail:alexqxp@qq.com。
 

 

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